PREFERRED TERM
plasma immersion ion implantation
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
PIII
SCOPE NOTE
-
PIII
IN OTHER LANGUAGES
کاشت یون فررورفتگی پلاسما
Persian
URI
http://www.irandoc.acir/onto/irandoc/INSP0009147