PREFERRED TERM
مسطحسازی
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
مسطحسازی مکانیکی شیمیایی
IN OTHER LANGUAGES
planarization
English
chemical mechanical planarization
URI
http://www.irandoc.acir/onto/irandoc/INSP0001672