PREFERRED TERM
نهشت بخار شیمیایی پلاسما
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
IN OTHER LANGUAGES
plasma chemical vapour deposition
English
plasma-enhanced CVD
URI
http://www.irandoc.acir/onto/irandoc/INSP000371