PREFERRED TERM
plasma chemical vapour deposition
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
plasma-enhanced CVD
SCOPE NOTE
-
plasma-enhanced CVD
IN OTHER LANGUAGES
نهشت بخار شیمیایی پلاسما
Persian
URI
http://www.irandoc.acir/onto/irandoc/INSP000371