PREFERRED TERM
vacuum deposition
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
evaporation (film deposition)
SCOPE NOTE
-
used for EVAPORATED layer production in vacuum
IN OTHER LANGUAGES
نهشت در خلاء
Persian
URI
http://www.irandoc.acir/onto/irandoc/INSP000387