PREFERRED TERM
ریزالکترونیک خلاء
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
NARROWER CONCEPTS
RELATED CONCEPTS
ENTRY TERMS
-
ابزار خلاء مجتمع
IN OTHER LANGUAGES
vacuum microelectronics
English
integrated vacuum device
URI
http://www.irandoc.acir/onto/irandoc/INSP000395