PREFERRED TERM
سنگنگاری با باریکه یونی
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
IN OTHER LANGUAGES
ion beam lithography
English
ion lithography
URI
http://www.irandoc.acir/onto/irandoc/INSP0009152