PREFERRED TERM
semiconductor technology
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
NARROWER CONCEPTS
RELATED CONCEPTS
- chemical mechanical polishing
- cluster tools
- crystal purification
- electron beam annealing
- electron beam lithography
- electronics packaging
- electron resist
- encapsulation
- etching
- focused ion beam technology
- getter
- incoherent light annealing
- integrated circuit technology
- integrated circuit yield
- ion beam lithography
- ion implantation
- laser beam annealing
- lead bonding
- lithography
- mask
- metallization
- microassembling
- micromachining
- micromechanical device
- monolithic integrated circuit
- nitridation
- oxidation
- passivation
- photolithography
- photoresist
- rapid thermal annealing
- rapid thermal processing
- resist
- semiconductor device
- semiconductor device manufacture
- semiconductor industry
- semiconductor materials
- SIMOX
- surface cleaning
- surface contamination
- vacuum microelectronics
- X-ray lithography
- zone melting recrystallization
- zone refining
ENTRY TERMS
-
semiconductor processing
SCOPE NOTE
-
see also under specific device headings
IN OTHER LANGUAGES
فناوری نیمرسانا
Persian
فراوری نیمرسانا
URI
http://www.irandoc.acir/onto/irandoc/INSP0001565