PREFERRED TERM
sputter etching
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
RIE
SCOPE NOTE
-
RIE
IN OTHER LANGUAGES
سونش کندوپاشی
Persian
آر.آی.ای
URI
http://www.irandoc.acir/onto/irandoc/INSP0001669