PREFERRED TERM
planarization
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
chemical mechanical planarization
IN OTHER LANGUAGES
مسطحسازی
Persian
مسطحسازی مکانیکی شیمیایی
URI
http://www.irandoc.acir/onto/irandoc/INSP0001672