PREFERRED TERM
chemical mechanical polishing
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
CMP
IN OTHER LANGUAGES
پرداخت مکانیکی شیمیایی
Persian
سی.ام.پی
URI
http://www.irandoc.acir/onto/irandoc/INSP0001673