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resonator > cavity resonator > superconducting cavity resonator
superconducting device > superconducting microwave device > superconducting cavity resonator
microwave device > superconducting microwave device > superconducting cavity resonator
superconducting device > superconducting resonator > superconducting cavity resonator
resonator > superconducting resonator > superconducting cavity resonator
PREFERRED TERM
superconducting cavity resonator
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