PREFERRED TERM
vacuum microelectronics
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
NARROWER CONCEPTS
RELATED CONCEPTS
ENTRY TERMS
-
integrated vacuum device
IN OTHER LANGUAGES
ریزالکترونیک خلاء
Persian
ابزار خلاء مجتمع
URI
http://www.irandoc.acir/onto/irandoc/INSP000395