PREFERRED TERM
X-ray lithography
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
NARROWER CONCEPTS
RELATED CONCEPTS
ENTRY TERMS
-
X-ray resist
SCOPE NOTE
-
X-ray resist
IN OTHER LANGUAGES
سنگنگاری پرتو ایکس
Persian
URI
http://www.irandoc.acir/onto/irandoc/INSP0008852