PREFERRED TERM
photolithography
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
NARROWER CONCEPTS
RELATED CONCEPTS
ENTRY TERMS
-
optical lithography
IN OTHER LANGUAGES
سنگنگاری نوری
Persian
URI
http://www.irandoc.acir/onto/irandoc/INSP0008853