PREFERRED TERM
ion beam lithography
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
ENTRY TERMS
-
ion lithography
SCOPE NOTE
-
ion lithography
IN OTHER LANGUAGES
سنگنگاری با باریکه یونی
Persian
URI
http://www.irandoc.acir/onto/irandoc/INSP0009152