PREFERRED TERM
low-k dielectric thin film
TYPE
-
http://www.irandoc.ac.ir/onto/irandoc-meta/Concept
BROADER CONCEPT
RELATED CONCEPTS
IN OTHER LANGUAGES
لایه نازک دیالکتریکی کا-کم
Persian
URI
http://www.irandoc.acir/onto/irandoc/INSP0010665