integrated circuit interconnection
type: Concept
preferred label: اتصال داخلی مدار مجمتع @fa
related: planarization

integrated circuit metallization
type: Concept
preferred label: فلزپوشانی مدار مجتمع @fa
related: planarization

planarization
type: Concept
alternative label: مسطح‌سازی مکانیکی شیمیایی @fa
alternative label: chemical mechanical planarization
broader: surface treatment
preferred label: مسطح‌سازی @fa
related: surface topography
related: integrated circuit interconnection
related: integrated circuit metallization
related: chemical mechanical polishing
related: dielectric thin film

chemical mechanical polishing
type: Concept
preferred label: پرداخت مکانیکی شیمیایی @fa
related: planarization

surface treatment
type: Concept
narrower: planarization
preferred label: آمایش سطح @fa

surface topography
type: Concept
preferred label: عارضه سطح @fa
related: planarization

dielectric thin film
type: Concept
preferred label: لایه نازک دی‌الکتریکی @fa
related: planarization