integrated circuit technology
type: Concept
preferred label: فناوری مدار مجتمع @fa
related: electron resist

semiconductor technology
type: Concept
preferred label: فناوری نیم‌رسانا @fa
related: electron resist

electron resist
type: Concept
alternative label: electron beam resist
broader: electron beam lithography
broader: resist
preferred label: لایه مقاوم به الکترون @fa
related: mask
related: semiconductor technology
related: photoresist
related: integrated circuit technology
scope note: لایه مقاوم به باریکه الکترون @fa
scope note: electron beam resist

photoresist
type: Concept
preferred label: لایه مقاوم به نور @fa
related: electron resist

resist
type: Concept
narrower: electron resist
preferred label: لایه مقاوم @fa

mask
type: Concept
preferred label: ماسک @fa
related: electron resist

electron beam lithography
type: Concept
narrower: electron resist
preferred label: سنگ‌نگاری با باریکه الکترون @fa