integrated circuit technology
type: Concept
preferred label: فناوری مدار مجتمع @fa
related: rapid thermal annealing

semiconductor technology
type: Concept
preferred label: فناوری نیم‌رسانا @fa
related: rapid thermal annealing

incoherent light annealing
type: Concept
preferred label: تابکاری نور ناهمدوس @fa
related: rapid thermal annealing

rapid thermal annealing
type: Concept
alternative label: RTA
broader: annealing
broader: rapid thermal processing
preferred label: تابکاری گرمایی سریع @fa
related: integrated circuit technology
related: semiconductor technology
related: incoherent light annealing
scope note: RTA

annealing
type: Concept
narrower: rapid thermal annealing
preferred label: تابکاری @fa

rapid thermal processing
type: Concept
narrower: rapid thermal annealing
preferred label: فرایند گرمایی سریع @fa