technology
preferred label: فناوری @fa
type: Concept
narrower: focused ion beam technology

ion beam lithography
preferred label: سنگ‌نگاری با باریکه یونی @fa
type: Concept
related: focused ion beam technology

ion beam
preferred label: باریکه یونی @fa
type: Concept
related: focused ion beam technology

integrated circuit technology
preferred label: فناوری مدار مجتمع @fa
type: Concept
related: focused ion beam technology

micromachining
preferred label: ریزماشین‌کاری @fa
type: Concept
related: focused ion beam technology

ion beam application
preferred label: کاربرد باریکه یونی @fa
type: Concept
narrower: focused ion beam technology

focusing
preferred label: کانونش @fa
type: Concept

ion optics
preferred label: نورشناسی یونی @fa
type: Concept
related: focused ion beam technology

particle beam focusing
preferred label: کانونش باریکه ذره‌ای @fa
type: Concept
narrower: focused ion beam technology

focused ion beam technology
broader: ion beam application
broader: technology
broader: particle beam focusing
related: semiconductor technology
related: ion optics
related: ion beam
related: ion beam lithography
related: focusing
related: micromachining
related: integrated circuit technology
preferred label: فناوری باریکه یونی کانونی‌شده @fa
type: Concept
scope note: حکاکی باریکه یونی کانونی‌شده @fa
scope note: focused ion beam etching
alternative label: focused ion beam etching

semiconductor technology
preferred label: فناوری نیم‌رسانا @fa
type: Concept
related: focused ion beam technology