@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/INSP0001556>
  skos:prefLabel "فناوری جداسازی"@fa, "isolation technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0002890>
  skos:prefLabel "لایه مقاوم به نور"@fa, "photoresist"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0006604>
  skos:prefLabel "روکش فلزی"@fa, "metallization"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001563>
  skos:prefLabel "مدل‌سازی فرایند نیم‌رسانا"@fa, "semiconductor process modelling"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0002982>
  skos:prefLabel "پالایش پرگنه‌ای"@fa, "zone refining"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0010197>
  skos:prefLabel "تابکاری باریکه لیزری"@fa, "laser beam annealing"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0008109>
  skos:prefLabel "mask"@en, "ماسک"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0002995>
  skos:prefLabel "بازبلورش ذوب منطقه‌ای"@fa, "zone melting recrystallization"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0014388>
  skos:prefLabel "اکسایش"@fa, "oxidation"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001670>
  skos:prefLabel "سونش"@fa, "etching"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0008856>
  skos:prefLabel "lithography"@en, "سنگ‌نگاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0011321>
  skos:prefLabel "پوشینه‌دارسازی"@fa, "encapsulation"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0005532>
  skos:prefLabel "مدار مجتمع یکپارچه"@fa, "monolithic integrated circuit"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001555>
  skos:prefLabel "clean room"@en, "اتاق تمیز"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0010355>
  skos:prefLabel "getter"@en, "گازربا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0003518>
  skos:prefLabel "ریزهمگذاری"@fa, "microassembling"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001562>
  skos:prefLabel "رشد نیم‌رسانا"@fa, "semiconductor growth"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001506>
  skos:prefLabel "فناوری باریکه یونی کانونی‌شده"@fa, "focused ion beam technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0010196>
  skos:prefLabel "تابکاری نور ناهمدوس"@fa, "incoherent light annealing"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0004611>
  skos:prefLabel "اثرناپذیرسازی"@fa, "passivation"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0009148>
  skos:prefLabel "کاشت یون"@fa, "ion implantation"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0003811>
  skos:prefLabel "پیوندزنی سربی"@fa, "lead bonding"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0008030>
  skos:prefLabel "مواد نیم‌رسانا"@fa, "semiconductor materials"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001561>
  skos:prefLabel "دوپه‌کردن نیم‌رسانا"@fa, "semiconductor doping"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0010195>
  skos:prefLabel "تاب‌کاری باریکه الکترون"@fa, "electron beam annealing"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001574>
  skos:prefLabel "فناوری"@fa, "technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001559>
  skos:prefLabel "فلزپوشانی افزار نیم‌رسانا"@fa, "semiconductor device metallization"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0004723>
  skos:prefLabel "بسته‌بندی الکترونیکی"@fa, "electronics packaging"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0002645>
  skos:prefLabel "افزار نیم‌رسانا"@fa, "semiconductor device"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001681>
  skos:prefLabel "تمیزکاری سطح"@fa, "surface cleaning"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0009981>
  skos:prefLabel "صنعت نیم‌رسانا"@fa, "semiconductor industry"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0009247>
  skos:prefLabel "SIMOX"@en, "سیماکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0006589>
  skos:prefLabel "افزار ریزمکانیکی"@fa, "micromechanical device"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001673>
  skos:prefLabel "پرداخت مکانیکی شیمیایی"@fa, "chemical mechanical polishing"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001560>
  skos:prefLabel "بسته‌بندی افزار نیم‌رسانا"@fa, "semiconductor device packaging"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0003529>
  skos:prefLabel "تولید افزار نیم‌رسانا"@fa, "semiconductor device manufacture"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0008853>
  skos:prefLabel "سنگ‌نگاری نوری"@fa, "photolithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001558>
  skos:prefLabel "اندازه‌گیری افزار نیم‌رسانا"@fa, "semiconductor device measurement"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0003385>
  skos:prefLabel "خالص‌سازی بلور"@fa, "crystal purification"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001565>
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001670>, <http://www.irandoc.acir/onto/irandoc/INSP0008852>, <http://www.irandoc.acir/onto/irandoc/INSP0001529>, <http://www.irandoc.acir/onto/irandoc/INSP0010195>, <http://www.irandoc.acir/onto/irandoc/INSP0003811>, <http://www.irandoc.acir/onto/irandoc/INSP0001506>, <http://www.irandoc.acir/onto/irandoc/INSP0003385>, <http://www.irandoc.acir/onto/irandoc/INSP0008030>, <http://www.irandoc.acir/onto/irandoc/INSP0011321>, <http://www.irandoc.acir/onto/irandoc/INSP0006589>, <http://www.irandoc.acir/onto/irandoc/INSP0010355>, <http://www.irandoc.acir/onto/irandoc/INSP0003529>, <http://www.irandoc.acir/onto/irandoc/INSP0003876>, <http://www.irandoc.acir/onto/irandoc/INSP0014388>, <http://www.irandoc.acir/onto/irandoc/INSP0009152>, <http://www.irandoc.acir/onto/irandoc/INSP0010196>, <http://www.irandoc.acir/onto/irandoc/INSP0006604>, <http://www.irandoc.acir/onto/irandoc/INSP0010197>, <http://www.irandoc.acir/onto/irandoc/INSP0010199>, <http://www.irandoc.acir/onto/irandoc/INSP0004611>, <http://www.irandoc.acir/onto/irandoc/INSP0008109>, <http://www.irandoc.acir/onto/irandoc/INSP0005532>, <http://www.irandoc.acir/onto/irandoc/INSP0002645>, <http://www.irandoc.acir/onto/irandoc/INSP000395>, <http://www.irandoc.acir/onto/irandoc/INSP0014384>, <http://www.irandoc.acir/onto/irandoc/INSP0009981>, <http://www.irandoc.acir/onto/irandoc/INSP0002889>, <http://www.irandoc.acir/onto/irandoc/INSP0003518>, <http://www.irandoc.acir/onto/irandoc/INSP0002891>, <http://www.irandoc.acir/onto/irandoc/INSP0002995>, <http://www.irandoc.acir/onto/irandoc/INSP0008853>, <http://www.irandoc.acir/onto/irandoc/INSP0009148>, <http://www.irandoc.acir/onto/irandoc/INSP0014269>, <http://www.irandoc.acir/onto/irandoc/INSP0013322>, <http://www.irandoc.acir/onto/irandoc/INSP0001673>, <http://www.irandoc.acir/onto/irandoc/INSP0008844>, <http://www.irandoc.acir/onto/irandoc/INSP0002982>, <http://www.irandoc.acir/onto/irandoc/INSP0001681>, <http://www.irandoc.acir/onto/irandoc/INSP0009247>, <http://www.irandoc.acir/onto/irandoc/INSP0008856>, <http://www.irandoc.acir/onto/irandoc/INSP0003527>, <http://www.irandoc.acir/onto/irandoc/INSP0010211>, <http://www.irandoc.acir/onto/irandoc/INSP0002890>, <http://www.irandoc.acir/onto/irandoc/INSP0004723> ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0001555>, <http://www.irandoc.acir/onto/irandoc/INSP0001560>, <http://www.irandoc.acir/onto/irandoc/INSP0001562>, <http://www.irandoc.acir/onto/irandoc/INSP0001561>, <http://www.irandoc.acir/onto/irandoc/INSP0001556>, <http://www.irandoc.acir/onto/irandoc/INSP0001557>, <http://www.irandoc.acir/onto/irandoc/INSP0001564>, <http://www.irandoc.acir/onto/irandoc/INSP0001563>, <http://www.irandoc.acir/onto/irandoc/INSP0001559>, <http://www.irandoc.acir/onto/irandoc/INSP0001558> ;
  skos:altLabel "semiconductor processing"@en, "فراوری نیم‌رسانا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:scopeNote "see also under specific device headings"@en ;
  skos:prefLabel "فناوری نیم‌رسانا"@fa, "semiconductor technology"@en ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001574> .

<http://www.irandoc.acir/onto/irandoc/INSP0010211>
  skos:prefLabel "فرایند گرمایی سریع"@fa, "rapid thermal processing"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0010199>
  skos:prefLabel "تابکاری گرمایی سریع"@fa, "rapid thermal annealing"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0003876>
  skos:prefLabel "ریزماشین‌کاری"@fa, "micromachining"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0014384>
  skos:prefLabel "نیتریداسیون"@fa, "nitridation"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0008852>
  skos:prefLabel "X-ray lithography"@en, "سنگ‌نگاری پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001557>
  skos:prefLabel "فروشکست افزار نیم‌رسانا"@fa, "semiconductor device breakdown"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001529>
  skos:prefLabel "فناوری مدار مجتمع"@fa, "integrated circuit technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0002891>
  skos:prefLabel "لایه مقاوم"@fa, "resist"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0014269>
  skos:prefLabel "ابزار خوشه‌ای"@fa, "cluster tools"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0002889>
  skos:prefLabel "لایه مقاوم به الکترون"@fa, "electron resist"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0001564>
  skos:prefLabel "پیوندزنی ویفری"@fa, "wafer bonding"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0008844>
  skos:prefLabel "سنگ‌نگاری با باریکه الکترون"@fa, "electron beam lithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0003527>
  skos:prefLabel "بهره مدار مجتمع"@fa, "integrated circuit yield"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0009152>
  skos:prefLabel "سنگ‌نگاری با باریکه یونی"@fa, "ion beam lithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP000395>
  skos:prefLabel "ریزالکترونیک خلاء"@fa, "vacuum microelectronics"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .

<http://www.irandoc.acir/onto/irandoc/INSP0013322>
  skos:prefLabel "آلایش سطحی"@fa, "surface contamination"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001565> .