@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/INSP0001673>
  skos:prefLabel "پرداخت مکانیکی شیمیایی"@fa, "chemical mechanical polishing"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001672> .

<http://www.irandoc.acir/onto/irandoc/INSP0001519>
  skos:prefLabel "integrated circuit interconnection"@en, "اتصال داخلی مدار مجمتع"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001672> .

<http://www.irandoc.acir/onto/irandoc/INSP0010667>
  skos:prefLabel "dielectric thin film"@en, "لایه نازک دی‌الکتریکی"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001672> .

<http://www.irandoc.acir/onto/irandoc/INSP0001742>
  skos:prefLabel "عارضه سطح"@fa, "surface topography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001672> .

<http://www.irandoc.acir/onto/irandoc/INSP0001672>
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001742>, <http://www.irandoc.acir/onto/irandoc/INSP0001519>, <http://www.irandoc.acir/onto/irandoc/INSP0001521>, <http://www.irandoc.acir/onto/irandoc/INSP0001673>, <http://www.irandoc.acir/onto/irandoc/INSP0010667> ;
  skos:prefLabel "planarization"@en, "مسطح‌سازی"@fa ;
  a skos:Concept, <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept> ;
  skos:altLabel "مسطح‌سازی مکانیکی شیمیایی"@fa, "chemical mechanical planarization"@en ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0001688> .

<http://www.irandoc.acir/onto/irandoc/INSP0001688>
  skos:prefLabel "آمایش سطح"@fa, "surface treatment"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0001672> .

<http://www.irandoc.acir/onto/irandoc/INSP0001521>
  skos:prefLabel "فلزپوشانی مدار مجتمع"@fa, "integrated circuit metallization"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001672> .