@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/INSP0003529>
  skos:prefLabel "تولید افزار نیم‌رسانا"@fa, "semiconductor device manufacture"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0008853>
  skos:prefLabel "سنگ‌نگاری نوری"@fa, "photolithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0008847>
  skos:prefLabel "سنگ‌نگاری غوطه‌‌وری"@fa, "immersion lithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0008851>
  skos:prefLabel "X-ray mask"@en, "ماسک پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0008106>
  skos:prefLabel "phase shifting mask"@en, "ماسک تغییرکننده فاز"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0003528>
  skos:prefLabel "ساخت مدار یکپارچه"@fa, "integrated circuit manufacture"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0008109>
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008852>, <http://www.irandoc.acir/onto/irandoc/INSP0008853>, <http://www.irandoc.acir/onto/irandoc/INSP0005557>, <http://www.irandoc.acir/onto/irandoc/INSP0001565>, <http://www.irandoc.acir/onto/irandoc/INSP0003528>, <http://www.irandoc.acir/onto/irandoc/INSP0002889>, <http://www.irandoc.acir/onto/irandoc/INSP0008847>, <http://www.irandoc.acir/onto/irandoc/INSP0003529> ;
  skos:prefLabel "ماسک"@fa, "mask"@en ;
  a skos:Concept, <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept> ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0008106>, <http://www.irandoc.acir/onto/irandoc/INSP0008851>, <http://www.irandoc.acir/onto/irandoc/INSP0008107> ;
  skos:altLabel "photomasks"@en .

<http://www.irandoc.acir/onto/irandoc/INSP0005557>
  skos:prefLabel "مدار مجتمع"@fa, "integrated circuit"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0002889>
  skos:prefLabel "لایه مقاوم به الکترون"@fa, "electron resist"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0001565>
  skos:prefLabel "فناوری نیم‌رسانا"@fa, "semiconductor technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0008852>
  skos:prefLabel "X-ray lithography"@en, "سنگ‌نگاری پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008109> .

<http://www.irandoc.acir/onto/irandoc/INSP0008107>
  skos:prefLabel "رتیکول"@fa, "reticles"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008109> .