@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/INSP0008844>
  skos:altLabel "لیتوگرافی با باریکه الکترون"@fa ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008856>, <http://www.irandoc.acir/onto/irandoc/INSP0011983> ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008854>, <http://www.irandoc.acir/onto/irandoc/INSP0001529>, <http://www.irandoc.acir/onto/irandoc/INSP0001565>, <http://www.irandoc.acir/onto/irandoc/INSP0008107>, <http://www.irandoc.acir/onto/irandoc/INSP0008846> ;
  a skos:Concept, <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept> ;
  skos:prefLabel "electron beam lithography"@en, "سنگ‌نگاری با باریکه الکترون"@fa ;
  skos:scopeNote "electron lithography"@en ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0002889> .

<http://www.irandoc.acir/onto/irandoc/INSP0001529>
  skos:prefLabel "فناوری مدار مجتمع"@fa, "integrated circuit technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008844> .

<http://www.irandoc.acir/onto/irandoc/INSP0008856>
  skos:prefLabel "lithography"@en, "سنگ‌نگاری"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0008844> .

<http://www.irandoc.acir/onto/irandoc/INSP0008854>
  skos:prefLabel "اثر مجاورت (سنگ‌نگاری)"@fa, "proximity effect (lithography)"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008844> .

<http://www.irandoc.acir/onto/irandoc/INSP0011983>
  skos:prefLabel "کاربرد باریکه الکترون"@fa, "electron beam application"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0008844> .

<http://www.irandoc.acir/onto/irandoc/INSP0002889>
  skos:prefLabel "لایه مقاوم به الکترون"@fa, "electron resist"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008844> .

<http://www.irandoc.acir/onto/irandoc/INSP0001565>
  skos:prefLabel "فناوری نیم‌رسانا"@fa, "semiconductor technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008844> .

<http://www.irandoc.acir/onto/irandoc/INSP0008107>
  skos:prefLabel "رتیکول"@fa, "reticles"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008844> .

<http://www.irandoc.acir/onto/irandoc/INSP0008846>
  skos:prefLabel "نانوسنگ‌نگاری"@fa, "nanolithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008844> .