@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

<http://www.irandoc.acir/onto/irandoc/INSP000028>
  skos:prefLabel "X-ray application"@en, "کاربرد پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0008849>
  skos:prefLabel "سنگ‌نگاری فرابنفش"@fa, "ultraviolet lithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0001529>
  skos:prefLabel "فناوری مدار مجتمع"@fa, "integrated circuit technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0008853>
  skos:prefLabel "سنگ‌نگاری نوری"@fa, "photolithography"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0008851>
  skos:prefLabel "X-ray mask"@en, "ماسک پرتو ایکس"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP000018>
  skos:prefLabel "plasma X-ray source"@en, "چشمه پرتو ایکس-پلاسما"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0003789>
  skos:prefLabel "LIGA"@en, "لیگا"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0008854>
  skos:prefLabel "اثر مجاورت (سنگ‌نگاری)"@fa, "proximity effect (lithography)"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0008109>
  skos:prefLabel "mask"@en, "ماسک"@fa ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0001565>
  skos:prefLabel "فناوری نیم‌رسانا"@fa, "semiconductor technology"@en ;
  a <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept>, skos:Concept ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0008852> .

<http://www.irandoc.acir/onto/irandoc/INSP0008852>
  skos:scopeNote "X-ray resist"@en ;
  skos:related <http://www.irandoc.acir/onto/irandoc/INSP0001529>, <http://www.irandoc.acir/onto/irandoc/INSP0008854>, <http://www.irandoc.acir/onto/irandoc/INSP0001565>, <http://www.irandoc.acir/onto/irandoc/INSP0008109>, <http://www.irandoc.acir/onto/irandoc/INSP0008849>, <http://www.irandoc.acir/onto/irandoc/INSP000018> ;
  skos:broader <http://www.irandoc.acir/onto/irandoc/INSP0008853>, <http://www.irandoc.acir/onto/irandoc/INSP000028> ;
  skos:narrower <http://www.irandoc.acir/onto/irandoc/INSP0008851>, <http://www.irandoc.acir/onto/irandoc/INSP0003789> ;
  skos:prefLabel "سنگ‌نگاری پرتو ایکس"@fa, "X-ray lithography"@en ;
  skos:altLabel "X-ray resist"@en ;
  a skos:Concept, <http://www.irandoc.ac.ir/onto/irandoc-meta/Concept> .