X ray apparatus
type: Concept
preferred label: دستگاه پرتو ایکس @fa
related: X ray lithography

X ray lithography
type: Concept
broader: photolithography
preferred label: سنگ‌نگاری پرتو ایکس @fa
related: X ray apparatus
related: integrated circuit manufacture
related: mask
related: semiconductor device manufacture
related: X ray

photolithography
type: Concept
narrower: X ray lithography
preferred label: چاپ نوری @fa

mask
type: Concept
preferred label: ماسک @fa
related: X ray lithography

integrated circuit manufacture
type: Concept
preferred label: تولید مدار مجتمع @fa
related: X ray lithography

semiconductor device manufacture
type: Concept
preferred label: تولید افزاره نیم‌رسانا @fa
related: X ray lithography

X ray
type: Concept
preferred label: پرتو ایکس @fa
related: X ray lithography