lithography
preferred label: سنگ‌نگاری @fa
type: Concept
narrower: electron beam lithography

electron beam
preferred label: باریکه الکترون @fa
type: Concept
related: electron beam lithography

electron beam lithography
related: electron beam
broader: lithography
preferred label: سنگ‌نگاری با باریکه الکترون @fa
type: Concept